The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2012
Filed:
Jul. 29, 2009
Madhu Sudan Ramavajjala, Plano, TX (US);
Kristi Bushman, Richardson, TX (US);
Robert Ray Spangler, Lucas, TX (US);
Stephen Arlon Meinser, Allen, TX (US);
Ronald Charles Roth, McKinney, TX (US);
Madhu Sudan Ramavajjala, Plano, TX (US);
Kristi Bushman, Richardson, TX (US);
Robert Ray Spangler, Lucas, TX (US);
Stephen Arlon Meinser, Allen, TX (US);
Ronald Charles Roth, McKinney, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
A manufacturing process including a controller method to generate a tool setting which includes a tool offset and a device offset. The controller method uses a device parameter measurement to update the tool offset and device offset. A tool weight and a device weight is assigned so that only one of the tool offset and device offset is significantly changed during the update. The process may be applied to semiconductor device manufacturing and particularly to integrated circuit fabrication.