The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2012
Filed:
Aug. 04, 2008
Applicants:
Ronald Charles Roth, McKinney, TX (US);
Georgina Marie Park, Dallas, TX (US);
Rosemary Urmese Anthraper, Richardson, TX (US);
Inventors:
Ronald Charles Roth, McKinney, TX (US);
Georgina Marie Park, Dallas, TX (US);
Rosemary Urmese Anthraper, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a lithography process using an ultraviolet process, the applied ultraviolet resist can be removed by intentionally condensing the ultraviolet resist before removing the ultraviolet resist.