Roman Barday

Title: Innovations of Roman Barday in Charged Particle Beam Technology

Introduction

Roman Barday is an accomplished inventor based in Poing, Germany. He has made significant contributions to the field of charged particle beam technology, holding three patents that showcase his innovative approach to specimen inspection and beam manipulation.

Latest Patents

His latest patents include a "Method for inspecting a specimen and charged particle beam device." This invention describes a charged particle beam device designed for irradiating or inspecting a specimen. The device features a charged particle beam source that generates a primary charged particle beam and a multi-aperture lens plate with multiple apertures for forming four or more primary beamlets. Additionally, it includes two or more electrodes with openings for the primary charged particle beam and a collimator for deflecting the primary beamlets. Another notable patent is the "Charged particle beam apparatus, multi-beamlet assembly, and method of inspecting a specimen." This apparatus utilizes a charged particle beam emitter to generate a beam propagating along an optical axis, along with a multi-beamlet generation and correction assembly that focuses the beamlets for precise inspection.

Career Highlights

Throughout his career, Roman has worked with notable companies such as Ict Integrated Circuit Testing and Applied Materials Israel Limited. His experience in these organizations has contributed to his expertise in the field of semiconductor testing and charged particle beam technology.

Collaborations

Roman has collaborated with professionals like Benjamin John Cook and Thomas Kemen, further enhancing his innovative projects and contributions to the industry.

Conclusion

Roman Barday's work in charged particle beam technology exemplifies his dedication to innovation and advancement in the field. His patents reflect a deep understanding of the complexities involved in specimen inspection and beam manipulation.