Location History:
- Tuscon, AZ (US) (2006)
- Satsuma, AL (US) (1990 - 2008)
- Hayward, CA (US) (2006 - 2008)
- Tuscon, AR (US) (2009)
- Park City, UT (US) (2010)
- Tucson, AZ (US) (2006 - 2011)
- Dublin, CA (US) (1999 - 2012)
Company Filing History:
25 out of 91 
12 out of 30 
2 out of 2 
Years Active: 1990-2012
Title: The Innovative Journey of Robert J. Small: A Leader in Chemical-Mechanical Planarization
Introduction: Robert J. Small, based in Dublin, California, is a prominent inventor with a remarkable portfolio of 46 patents to his name. His work focuses on innovations in chemical-mechanical planarization, a critical area of research in nanotechnology and materials science.
Latest Patents: Among his latest inventions, Robert has developed compositions for chemical-mechanical planarization of noble-metal-featured substrates. This noteworthy composition includes periodic acid and an abrasive, formulated to effectively planarize substrate surfaces featuring noble metals, noble metal alloys, or their oxides. The precise amounts of periodic acid and abrasive are calibrated to ensure optimal performance during the planarization process. Additionally, his innovations encompass methods for rapidly removing overfilled substrates, utilizing oxidizers such as peracetic acid and periodic acid to achieve high removal rates.
Career Highlights: Robert's career includes significant roles at leading companies, including EKC Technology and DuPont Air Products Nanomaterials, LLC. His contributions at these firms have played a vital role in advancing technologies that enhance semiconductor manufacturing processes.
Collaborations: Throughout his career, Robert has collaborated with esteemed colleagues such as Maria L. Peterson and Wai Mun Lee. These partnerships have fostered a conducive environment for innovation, leading to the development of groundbreaking technologies in the field.
Conclusion: Robert J. Small's career is a testament to his commitment to innovation in the realm of chemical-mechanical planarization. With his extensive experience and numerous patents, he continues to shape the future of materials science and semiconductor technology, making lasting contributions to the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.