The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2008
Filed:
Aug. 17, 2004
Robert J. Small, Dublin, CA (US);
Bakul P. Patel, Pleasanton, CA (US);
Wai Mun Lee, Fremont, CA (US);
Douglas Holmes, San Ramon, CA (US);
Jerome Daviot, Antony, FR;
Chris Reid, Glasgow, GB;
Robert J. Small, Dublin, CA (US);
Bakul P. Patel, Pleasanton, CA (US);
Wai Mun Lee, Fremont, CA (US);
Douglas Holmes, San Ramon, CA (US);
Jerome Daviot, Antony, FR;
Chris Reid, Glasgow, GB;
EKC Technology, Inc., Hayward, CA (US);
Abstract
A composition for the stripping of photoresist and the cleaning of residues from substrates, and for silicon oxide etch, comprising from about 0.01 percent by weight to about 10 percent by weight of one or more fluoride compounds, from about 10 percent by weight to about 95% by weight of a sulfoxide or sulfone solvent, and from about 20 percent by weight to about 50 percent by weight water. The composition may contain corrosion inhibitors, chelating agents, co-solvents, basic amine compounds, surfactants, acids and bases.