Bakul P Patel

Title: Innovations by Inventor Bakul P Patel in Semiconductor Cleaning Technologies

Introduction

Bakul P Patel is a notable inventor based in Pleasanton, California, renowned for his contributions to the semiconductor industry. With a portfolio of five patents, Patel has focused on developing advanced cleaning compositions and methods that address the challenges faced in semiconductor device manufacturing.

Latest Patents

Among his recent innovations, Patel has introduced groundbreaking patents that include:

1. **Compositions for Cleaning Organic and Plasma Etched Residues for Semiconductor Devices** - This patent involves a composition designed for stripping photoresist and cleaning residues from substrates. It comprises a unique blend of fluorides, sulfoxide or sulfone solvents, and water, potentially including corrosion inhibitors, chelating agents, co-solvents, surfactants, and acids/bases.

2. **Methods for Chemically Treating a Substrate Using Foam Technology** - This invention relates to the treatment of substrate surfaces using foam technology to effectively remove unwanted materials such as organic and inorganic compounds. The method includes generating foam from a specially formulated liquid composition, which effectively contacts the surface and cleans it of impurities.

Career Highlights

Bakul P Patel is a key innovative force at EKC Technology Inc., where he applies his expertise in chemical formulations to improve the cleaning processes essential for semiconductor manufacturing. His work has significantly contributed to enhancing the efficiency and effectiveness of cleaning methods used in the industry.

Collaborations

Throughout his career, Patel has collaborated with talented professionals, including Robert J Small and Wai Mun Lee. These partnerships have been instrumental in furthering his research and development efforts, allowing for the creation of cutting-edge technologies that advance semiconductor manufacturing practices.

Conclusion

With his five patents, Bakul P Patel exemplifies the spirit of innovation within the semiconductor industry. His work not only enhances the production processes but also addresses critical challenges in cleaning technology, paving the way for more efficient semiconductor device fabrication. As the industry continues to evolve, Patel's contributions will undoubtedly play a pivotal role in shaping the future of semiconductor manufacturing.