Location History:
- Dresdan, DE (2012)
- Portland, OR (US) (2004 - 2013)
Company Filing History:
Years Active: 2004-2013
Title: The Innovative Contributions of Robert Charatan
Introduction
Robert Charatan is a prominent inventor based in Portland, OR (US). He has made significant contributions to the field of technology, particularly in the area of semiconductor manufacturing. With a total of 16 patents to his name, Charatan has established himself as a key figure in innovation.
Latest Patents
Charatan's latest patents include groundbreaking methods for critical dimension reduction and roughness control. One of his notable inventions involves a method for forming a feature in an etch layer. This process includes the formation of a photoresist layer over the etch layer, which is then patterned to create photoresist features with specific sidewalls. A control layer is subsequently formed over the photoresist layer and the bottoms of the photoresist features. A conformal layer is deposited over the sidewalls of the photoresist features and control layer to effectively reduce the critical dimensions of the photoresist features. Openings in the control layer are created using a control layer breakthrough chemistry, allowing features to be etched into the etch layer with a different etch chemistry. This innovative approach enhances the etch resistance of the control layer compared to the conformal layer.
Another significant patent involves a system and method for critical dimension reduction and pitch reduction. This system includes forming a mask of a first material on an underlying layer, which initially has an incorrect profile. The profile of the mask is then corrected, allowing for the formation of a feature in the underlying layer. This method showcases Charatan's expertise in refining processes to achieve precise results.
Career Highlights
Charatan's career is marked by his association with Lam Research Corporation, a leading company in the semiconductor industry. His work has contributed to advancements in manufacturing techniques that are crucial for the development of modern electronic devices.
Collaborations
Throughout his career, Charatan has collaborated with talented individuals such as Sangheon Lee and Jisoo Kim. These collaborations have further enriched his work and led to innovative solutions in the field.
Conclusion
Robert Charatan's contributions to technology and innovation are noteworthy. His patents reflect a deep understanding of semiconductor processes and a commitment to advancing the industry. His work continues to influence the future of technology and manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.