Company Filing History:
Years Active: 2012-2017
Title: Richard Wen: Innovator in Polishing Compositions
Introduction
Richard Wen, an accomplished inventor based in Mesa, AZ, has made significant contributions to the field of semiconductor technology. With a remarkable portfolio comprising seven patents, Wen has been instrumental in developing innovative solutions that enhance the performance and efficiency of semiconductor substrates.
Latest Patents
One of Wen's latest patents focuses on polishing compositions and methods for polishing cobalt films. This groundbreaking invention relates to compositions that effectively polish cobalt (Co) films in semiconductor substrates, which may include various films such as metals, metal oxides, and dielectrics. The polishing compositions incorporate an abrasive, a weak acid that acts as a removal rate enhancer (RRE), a pH adjuster, and a corrosion inhibitor containing azole. By optimizing the pH of the polishing composition, which operates within the 7-12 range and limits sulfate and halide ions to below 100 parts per million, Wen's invention addresses critical needs in the semiconductor manufacturing process.
Career Highlights
Throughout his career, Richard Wen has worked with esteemed companies such as Fujifilm Planar Solutions and Planar Solutions. His work in these organizations has allowed him to refine his expertise in semiconductor technologies, leading to his impressive patent portfolio.
Collaborations
Wen has collaborated with notable professionals in the field, including Deepak Mahulikar and Bin Hu. These partnerships have fostered the exchange of ideas and techniques, further driving innovation in the semiconductor industry.
Conclusion
Richard Wen's contributions to the development of polishing compositions for cobalt films have positioned him as a key player in the realm of semiconductor technology. His inventive spirit and collaborative nature continue to inspire advancements within the industry, proving that innovation is essential for progress.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.