Company Filing History:

3 out of 399

Axcelis Technologies, Inc.

Lam Research Corporation

patents

Years Active: 2000-2013

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5 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8580076 - Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith (2013-11-12),

2. 8119413 - Method and system for detection of solid materials in a plasma using an electromagnetic circuit (2012-02-21),

3. 7794663 - Method and system for detection of solid materials in a plasma using an electromagnetic circuit (2010-09-14),

4. 7338575 - Hydrocarbon dielectric heat transfer fluids for microwave plasma generators (2008-03-04),

5. 6057645 - Plasma discharge device with dynamic tuning by a movable microwave trap (2000-05-02),

Title: Richard E Pingree, Jr: Pioneering Inventor from New Market

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Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.