The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 14, 2010
Filed:
Feb. 19, 2004
Richard E. Pingree, Jr., New Market, MD (US);
Palanikumara Sakthivel, Gaithersburg, MD (US);
Muhesh Vanodia, Germantown, MD (US);
Michael B. Colson, Woodbine, MD (US);
Richard E. Pingree, Jr., New Market, MD (US);
Palanikumara Sakthivel, Gaithersburg, MD (US);
Muhesh Vanodia, Germantown, MD (US);
Michael B. Colson, Woodbine, MD (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.