Company Filing History:
Years Active: 2010-2012
Title: Innovations of Palanikumara Sakthivel
Introduction
Palanikumara Sakthivel is an accomplished inventor based in Gaithersburg, MD (US). He has made significant contributions to the field of solid material detection in plasma environments. With a total of 2 patents, his work showcases innovative methods that enhance the understanding and management of materials in various industrial applications.
Latest Patents
Sakthivel's latest patents include a method and system for the detection of solid materials in a plasma using an electromagnetic circuit. This method involves receiving an exhaust gas downstream from a workpiece from which a photoresist material has been removed. An electromagnetic circuit is configured to include the exhaust gas, which is then excited with electromagnetic energy. The impedance value of the electromagnetic circuit is determined, corresponding to the amount of solid material present within the exhaust gas. This innovative approach provides a reliable means of monitoring solid materials in plasma processes.
Career Highlights
Palanikumara Sakthivel is currently employed at Axcelis Technologies, Inc., where he continues to develop and refine his inventions. His work at Axcelis has positioned him as a key player in advancing technologies related to semiconductor manufacturing and plasma processing.
Collaborations
Sakthivel has collaborated with notable colleagues, including Richard E Pingree, Jr. and Michael B Colson. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Palanikumara Sakthivel's contributions to the field of solid material detection in plasma environments highlight his innovative spirit and dedication to advancing technology. His patents and work at Axcelis Technologies, Inc. reflect a commitment to improving industrial processes and enhancing material management.