Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Axcelis Technologies, Inc. (2 from 400 patents)
2 patents:
1. 8119413 - Method and system for detection of solid materials in a plasma using an electromagnetic circuit
2. 7794663 - Method and system for detection of solid materials in a plasma using an electromagnetic circuit