Axcelis Technologies, Inc.

Eaton Corporation

Lam Research Corporation

Richard E Pingree, Jr

Michael B Colson

Aseem Kumar Srivastava

Palanikumara Sakthivel

Carlo Waldfried

Alan Frederick Becknell

Palanikumaran Sakthivel

Thomas James Buckley

David Ferris

Victor Pellicier

Mahesh Vanodia

Muhesh Vanodia

Michael Silbert

A plasma apparatus, various components of the plasma apparatus, and an oxygen free and nitrogen free processes for effectively removing photoresist material and post etch residues from a substrate with a carbon and/or hydrogen containing low k dielectric layer(s).

Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith

A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.

Method and system for detection of solid materials in a plasma using an electromagnetic circuit

A process and apparatus for cooling a plasma tube generally includes flowing a hydrocarbon dielectric heat transfer fluid into a space defined by the plasma tube and a concentric tube surrounding the plasma tube. In one embodiment, the hydrocarbon fluid is selected to have a dissipation factor less than 0.002 and a thermal efficiency coefficient greater than or equal to 1.30 kJ/kg*K.

Hydrocarbon dielectric heat transfer fluids for microwave plasma generators

A plasma discharge device and method for removing material from a substrate having dynamic tuning, which permits operation with a variety of process gasses over a range of operating conditions. A longitudinally extending microwave cavity is defined at the ends by microwave traps, the positions of which are longitudinally adjustable to provide dynamic tuning. An adjustable antenna is provided, and operation utilizes the TM.sub.012 mode.

Plasma discharge device with dynamic tuning by a movable microwave trap

Growing community of inventors

New Market, MD, United States of America

Richard E Pingree, Jr