Company Filing History:

29 out of 29,232

Texas Instruments Corporation

patents

1 out of 4,988

United States of America As Represented by the Secretary of the Air Force

patents

Years Active: 1985-1993

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30 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 5262610 - Low particulate reliability enhanced remote microwave plasma discharge (1993-11-16),

2. 5248636 - Processing method using both a remotely generated plasma and an in-situ (1993-09-28),

3. 5138973 - Wafer processing apparatus having independently controllable energy (1992-08-18),

4. 4997520 - Method for etching tungsten (1991-03-05),

5. 4988644 - Method for etching semiconductor materials using a remote plasma (1991-01-29),

6. 4923562 - Processing of etching refractory metals (1990-05-08),

7. 4915777 - Method for etching tungsten (1990-04-10),

8. 4911103 - Processing apparatus and method (1990-03-27),

9. 4891488 - Processing apparatus and method (1990-01-02),

10. 4891087 - Isolation substrate ring for plasma reactor (1990-01-02),

11. 4886570 - Processing apparatus and method (1989-12-12),

12. 4878994 - Method for etching titanium nitride local interconnects (1989-11-07),

13. 4874723 - Selective etching of tungsten by remote and in situ plasma generation (1989-10-17),

14. 4867841 - Method for etch of polysilicon film (1989-09-19),

15. 4863558 - Method for etching tungsten (1989-09-05),

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