The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 1989
Filed:
Dec. 02, 1988
Applicant:
Inventors:
Cecil J Davis, Greenville, TX (US);
Robert T Matthews, Plano, TX (US);
Lee M Loewenstein, Plano, TX (US);
Rhett B Jucha, Celeste, TX (US);
Randall C Hildenbrand, Richardson, TX (US);
John I Jones, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C03C / ; B05D / ; C23C / ;
U.S. Cl.
CPC ...
156643 ; 118 501 ; 156345 ;
Abstract
A process module having remote plasma and in situ plasma generators, a source of ultraviolet, and a radiant heater, which represent four separate energy sources. The four sources can be used singly or in any combination and can be separately controllable.