The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 07, 1989
Filed:
Mar. 29, 1988
Applicant:
Inventors:
Rhett B Jucha, Celeste, TX (US);
Cecil J Davis, Greenville, TX (US);
Tom Tang, Dallas, TX (US);
Lee M Loewenstein, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
C23F / ; B44C / ; C03C / ; H01L / ;
U.S. Cl.
CPC ...
156643 ; 156646 ; 156656 ; 1566591 ; 156667 ; 20419235 ; 20419237 ; 427 38 ;
Abstract
A process for the etching of titanium containing film which utilizes both in situ and remote plasmas, and a gas mixture for the plasmas which comprises a halogen gas at low pressure and moderate temperature to produce an etch which is both selective to selected materials, for example, titanium silicide etc., and anisotropic.
Jucha, Rhett. (1989). Method for etching titanium nitride local interconnects (U.S. Patent No. 4878994). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4878994
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile