Ren-Wei Xiao

Title: Ren-Wei Xiao: Innovator in Semiconductor Technology

Introduction

Ren-Wei Xiao is a prominent inventor based in Shetou, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on innovative methods for enhancing semiconductor structures, which are crucial for modern electronic devices.

Latest Patents

One of Ren-Wei Xiao's latest patents is titled "Method of forming semiconductor structures including metal insulator metal capacitor." This method involves creating a metal insulator metal (MIM) capacitor by forming a copper bulk layer in a base layer. The process includes the formation of a hillock extending from the top surface of the copper bulk layer. Additionally, an etch stop layer is deposited over the base layer and the copper bulk layer, followed by an oxide-based dielectric layer. The final steps involve forming a capacitor over the dielectric layer and creating a contact that extends through the oxide-based dielectric layer and the etch stop layer to connect with the copper bulk layer, effectively removing the hillock in the process.

Another notable patent is "Methods of forming metal pad structures over TSVs to reduce shorting of upper metal layers." This patent presents various mechanisms for creating a slotted metal pad over a through-silicon via (TSV) in a substrate. The dielectric structures within the slotted metal pad are designed to minimize the dishing effect during the planarization of the pad. This innovation significantly reduces the risk of metal stringers in the upper metal levels caused by the dishing effect.

Career Highlights

Ren-Wei Xiao is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approaches have positioned him as a key player in advancing semiconductor technologies.

Collaborations

Ren-Wei has collaborated with notable colleagues, including Chia-Wei Liu and Chung-Chuan Tseng. Their combined efforts contribute to the ongoing advancements in semiconductor research and development.

Conclusion

Ren-Wei Xiao's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the development of advanced electronic components, ensuring the progress of technology in the industry.