Remi Dussart

Title: The Innovative Contributions of Remi Dussart

Introduction

Remi Dussart is a notable inventor based in Saint-Mesmin, France. He has made significant contributions to the field of etching methods and apparatuses, holding a total of three patents. His work has advanced the technology used in various industrial applications.

Latest Patents

Dussart's latest patents include an etching method and etching apparatus. This method involves a physical adsorption process that adsorbs an adsorbate based on a first processing gas on a film to be etched. The process occurs under specific pressure conditions while cooling the object being processed. Another significant patent focuses on selective etching with fluorine, oxygen, and noble gas containing plasmas. This method processes a substrate through a cyclic plasma etch process, which includes generating plasmas from specific gas mixtures and performing deposition and etch steps.

Career Highlights

Throughout his career, Remi Dussart has worked with prominent companies such as Tokyo Electron Limited and Université d'Orléans. His experience in these organizations has contributed to his expertise in the field of plasma processing and etching technologies.

Collaborations

Dussart has collaborated with various professionals, including Shigeru Tahara and Jacques Faguet. These collaborations have likely enriched his work and led to innovative advancements in his projects.

Conclusion

Remi Dussart's contributions to the field of etching methods and apparatuses demonstrate his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in industrial applications.