Fremont, CA, United States of America

Ramesh Gopalan

USPTO Granted Patents = 14 

Average Co-Inventor Count = 2.4

ph-index = 2

Forward Citations = 7(Granted Patents)


Company Filing History:


Years Active: 2006-2024

where 'Filed Patents' based on already Granted Patents

14 patents (USPTO):

Title: Ramesh Gopalan: Innovator in Semiconductor Technology

Introduction

Ramesh Gopalan is a prominent inventor based in Fremont, CA, known for his significant contributions to semiconductor technology. With a total of 14 patents to his name, Gopalan has made remarkable advancements in the field, particularly in the measurement and processing of semiconductor materials.

Latest Patents

Among his latest patents is the invention titled "Wireless in-situ real-time measurement of electrostatic chucking force in semiconductor wafer processing." This invention includes an apparatus designed for measuring chucking force, which comprises a substrate with a chucking surface supported by a chuck. The apparatus features a plurality of thin film sensors that are less thick than the substrate, along with a wireless communication module connected to each sensor. Another notable patent is "Inline measurement of process gas dissociation using infrared absorption." This invention provides methods for measuring the dissociation of process gas generated by a reactive plasma source (RPS). The method involves receiving a process gas, irradiating it with infrared radiation, and detecting the IR radiation to determine the degree of dissociation of polyatomic molecules.

Career Highlights

Ramesh Gopalan has worked with leading companies in the semiconductor industry, including Applied Materials, Inc. and Lam Research Corporation. His experience in these organizations has allowed him to develop innovative solutions that enhance semiconductor processing techniques.

Collaborations

Throughout his career, Gopalan has collaborated with notable professionals in the field, including Sridharan Srivatsan and Simon Yavelberg. These collaborations have contributed to the advancement of semiconductor technologies and the successful implementation of his inventions.

Conclusion

Ramesh Gopalan's work in semiconductor technology exemplifies innovation and dedication to advancing the industry. His patents reflect a commitment to improving measurement techniques and processing methods, making a lasting impact on the field.

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