Company Filing History:

5 out of 6

Nexx Systems, Inc.

patents

Years Active: 2006-2016

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12 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 9453290 - Apparatus for fluid processing a workpiece (2016-09-27),

2. 8512543 - Method for fluid processing a workpiece (2013-08-20),

3. 8277624 - Method and apparatus for fluid processing a workpiece (2012-10-02),

4. 8168057 - Balancing pressure to improve a fluid seal (2012-05-01),

5. 8038856 - Method and apparatus for fluid processing a workpiece (2011-10-18),

6. 7822586 - System and method for optimizing and simulating thermal management systems and predictive flow control (2010-10-26),

7. 7727366 - Balancing pressure to improve a fluid seal (2010-06-01),

8. 7722747 - Method and apparatus for fluid processing a workpiece (2010-05-25),

9. 7445697 - Method and apparatus for fluid processing a workpiece (2008-11-04),

10. 7387661 - Pleated construction for effecting gas transfer membrane (2008-06-17),

11. 7311808 - Device and method for increasing mass transport at liquid-solid diffusion boundary layer (2007-12-25),

12. 7014679 - Process for degassing an aqueous plating solution (2006-03-21),

Title: The Innovative Contributions of Qunwei Wu

Introduction

Qunwei Wu is a notable inventor based in Westford, MA, with a significant portfolio of 12 patents. His work primarily focuses on fluid processing technologies, particularly in the semiconductor industry. Wu's innovative approaches have contributed to advancements in the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents, Wu has developed an "Apparatus for fluid processing a workpiece" and a "Method for fluid processing a workpiece." These patents detail a method of fluid processing a semiconductor workpiece, which includes a workpiece holder with a housing capable of containing a fluid. The agitation system connected to the housing comprises a member that agitates the fluid by moving parallel to the surface of the workpiece with a non-uniform oscillatory motion. This motion consists of a series of geometrically asymmetric oscillations, enhancing the processing capabilities for semiconductor workpieces.

Career Highlights

Qunwei Wu has had a distinguished career, working with prominent companies such as Nexx Systems, Inc. and Entegris, Inc. His experience in these organizations has allowed him to refine his skills and contribute to significant advancements in fluid processing technologies.

Collaborations

Throughout his career, Wu has collaborated with talented individuals, including Arthur Keigler and John Harrell. These collaborations have fostered an environment of innovation and have led to the development of groundbreaking technologies in the semiconductor field.

Conclusion

Qunwei Wu's contributions to the field of fluid processing in semiconductor manufacturing are noteworthy. His innovative patents and career achievements reflect his dedication to advancing technology in this critical industry. Wu's work continues to influence the future of semiconductor processing.

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