Nexx Systems, Inc.

Entegris, Inc.

Tel Nexx, Inc.

Mykrolis Corporation

Qunwei Wu

Arthur Keigler

Zhenqiu Liu

John Harrell

Craig L Brodeur

Jieh-Hwa Shyu

Saksatha Ly

John E Pillion

Joseph E Smith

Bipin S Parekh

Eric McNamara

Jieh Hwa Shyu

A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.

Apparatus for fluid processing a workpiece

Method for fluid processing a workpiece

A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

Method and apparatus for fluid processing a workpiece

A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.

Balancing pressure to improve a fluid seal

A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

Embodiments of the present invention include a computer program product including computer instructions that are executable to receive a set of process parameters, including fluid parameters and heat exchanger parameters, and determine a time for a dispense fluid to reach a target temperature. Additionally, the instructions can be executable to determine a set of process parameters that result in a time to reach the target temperature of below a predefined limit. According to another embodiment of the present invention, a set of computer instructions can calculate the time it takes for a dispense fluid to reach a target temperature for predictive flow control of a heating/cooling fluid.

System and method for optimizing and simulating thermal management systems and predictive flow control

A method and apparatus for fluid sealing a workpiece retained by a workpiece holder are described. A pressure differential can be formed across a fluid seal to counteract fluid attempting to penetrate the fluid seal, which can contaminate the underside of the workpiece. The apparatus can include a ring forming a barrier to fluid entry with the workpiece and a source providing pressure to form the pressure differential. The pressure or the pressure differential can counteract hydroscopic fluid pressure or hydrostatic fluid pressure that is acting to force fluid through the barrier between the ring and the workpiece.

A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.

A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a second fluid. At least one baffle is positioned within a first flow path for the first fluid.

Pleated construction for effecting gas transfer membrane

A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.

Device and method for increasing mass transport at liquid-solid diffusion boundary layer

A process for removing oxygen from a copper plating solution is provided. The solution is passed through a degasser comprising a shell and hollow hydrophobic fiber porous membranes wherein the shell while a vacuum is drawn on the surfaces of the fibers opposite the fiber surfaces contacted by the solution. Gas passed through the fiber walls while liquid is prevented from infiltrating the fiber pores. The composition of the solution is monitored so that the composition can be retained substantially constant by adding components of the solution as needed.

Growing community of inventors

Westford, MA, United States of America

Qunwei Wu