The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2007
Filed:
May. 02, 2003
Qunwei Wu, Westford, MA (US);
Craig L. Brodeur, Marlborough, MA (US);
John E. Pillion, Hollis, NH (US);
Jieh Hwa Shyu, Andover, MA (US);
Qunwei Wu, Westford, MA (US);
Craig L. Brodeur, Marlborough, MA (US);
John E. Pillion, Hollis, NH (US);
Jieh Hwa Shyu, Andover, MA (US);
Entegris, Inc., Chaska, MN (US);
Abstract
A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.