Pengyi Zhang

Title: Innovations of Pengyi Zhang in Semiconductor Manufacturing

Introduction

Pengyi Zhang is a notable inventor based in Tigard, Oregon, who has made significant contributions to the field of semiconductor manufacturing. With a total of six patents to his name, Zhang's work focuses on enhancing the efficiency and effectiveness of semiconductor processes.

Latest Patents

One of Zhang's latest patents is titled "Selective deposition of etch-stop layer for enhanced patterning." This patent presents methods, systems, and computer programs for the selective deposition of etch-stop layers during semiconductor manufacturing. The method involves adding a photo-resist material on top of a base material of a substrate, which defines a pattern for etching in areas where the photo-resist is not present. The process further includes operations for conformally capping the substrate with an oxide material after adding the photo-resist, followed by gap filling the substrate with a filling material. A stop-etch material is selectively grown on exposed surfaces of the substrate, and the method includes operations for removing the photo-resist from the substrate and etching the substrate to transfer the pattern.

Career Highlights

Zhang has worked with Lam Research Corporation, a leading company in the semiconductor equipment industry. His experience at Lam Research has allowed him to develop innovative solutions that address challenges in semiconductor manufacturing.

Collaborations

Zhang has collaborated with notable professionals in his field, including Elham Mohimi and Nagraj Shankar. These collaborations have contributed to the advancement of semiconductor technologies and have fostered a productive exchange of ideas.

Conclusion

Pengyi Zhang's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his role as a key inventor in the industry. His work continues to influence the development of advanced semiconductor processes.