The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2020
Filed:
Aug. 06, 2018
Lam Research Corporation, Fremont, CA (US);
Dennis Hausmann, Lake Oswego, OR (US);
Elham Mohimi, Hillsboro, OR (US);
Pengyi Zhang, Tigard, OR (US);
Paul C. Lemaire, Raleigh, NC (US);
Kashish Sharma, Fremont, CA (US);
Alexander R. Fox, Portland, OR (US);
Nagraj Shankar, Tualatin, OR (US);
Kapu Sirish Reddy, Portland, OR (US);
David Charles Smith, Lake Oswego, OR (US);
Lam Rasearch Corporation, Fremont, CA (US);
Abstract
A method of improving selectivity of a metal in a selective deposition process. A pre-treatment process for the metal modifies the metal surface, and includes first reducing the metal to remove organic contamination from the metal followed by oxidation of the metal to allow a monolayer of a metal oxide to grow on the surface. This modification of the metal allows inhibitor molecules to adsorb on the metal oxide monolayer to improve selectivity.