Company Filing History:
Years Active: 2016
Title: Pei Xi: Innovator in Magnetic Sensors and MEMS Devices
Introduction
Pei Xi is a prominent inventor based in Shanghai, China. He has made significant contributions to the fields of magnetic sensors and micro-electro-mechanical systems (MEMS) devices. With a total of 3 patents, his work showcases innovative methods that enhance the functionality and efficiency of these technologies.
Latest Patents
Pei Xi's latest patents include a method for forming a magnetic sensor. This method involves several steps, such as forming a hard mask film on a tantalum nitride film and implementing an isotropic dry etching process. This process allows for effective removal of the hard mask film, ensuring that the dimensions of the magnetic sensor can be easily controlled without the occurrence of shadow effects.
Another notable patent is a method of forming a MEMS device. This method includes providing a substrate, forming a tantalum nitride layer, and applying a dielectric anti-reflective coating. The DARC layer plays a crucial role in preventing the formation of tantalum-containing polymeric substances during the ashing process, thereby improving the overall quality of the MEMS device.
Career Highlights
Pei Xi is currently employed at Shanghai Huahong Grace Semiconductor Manufacturing Corporation. His work at this company has allowed him to further develop his innovative ideas and contribute to advancements in semiconductor technology.
Collaborations
Pei Xi collaborates with talented individuals such as Lei Xiong and Zhenxing Zhang. Their combined expertise fosters a creative environment that drives innovation in their respective fields.
Conclusion
Pei Xi's contributions to the fields of magnetic sensors and MEMS devices highlight his role as a leading inventor. His innovative methods and collaborative efforts continue to push the boundaries of technology.