Paykin Irina

Title: Paykin Irina: Innovator in Metrology Technologies

Introduction

Paykin Irina is a notable inventor based in Haifa, Israel, recognized for his contributions to metrology technologies. He holds two patents that showcase his innovative approach to solving complex problems in the field.

Latest Patents

Irina's latest patents include "Symmetric target design in scatterometry overlay metrology" and "Phase characterization of targets." The first patent provides methods, systems, and targets that implement a side-by-side paradigm to extract overlay errors using adjacent cells with periodic structures. This design incorporates controllable phase shifts or image shifts, enabling algorithmic computation of the overlay while reducing errors through rotational symmetry. The second patent outlines systems and methods that derive target characteristics from interferometry images taken at multiple phase differences. This approach enhances the performance of metrology systems by combining angular and spectroscopic scatterometry data.

Career Highlights

Irina is currently employed at KLA-Tencor Corporation, where he applies his expertise in metrology to advance the company's technological capabilities. His work focuses on developing innovative solutions that improve measurement accuracy and efficiency in semiconductor manufacturing.

Collaborations

Some of his notable coworkers include Barak Bringoltz and Daniel Kandel, who collaborate with him on various projects within the company.

Conclusion

Paykin Irina's contributions to metrology through his patents and work at KLA-Tencor Corporation highlight his significant role in advancing technology in this field. His innovative solutions continue to impact the industry positively.