Company Filing History:
Years Active: 2004-2018
Title: Paul Kaufmann: Innovator in Microlithography Technology
Introduction
Paul Kaufmann is a notable inventor based in Aalen, Germany. He has made significant contributions to the field of microlithography, particularly through his innovative projection exposure systems. With a total of 4 patents to his name, Kaufmann's work has had a profound impact on the technology used in semiconductor manufacturing.
Latest Patents
One of Kaufmann's latest patents is a projection exposure system for microlithography that includes a measurement device. This system features a mask holding device that secures a mask with intricate mask structures. It also incorporates a substrate holding device that supports a substrate during the exposure process. The projection optics in this system are designed to image the mask structures onto the substrate while simultaneously imaging a measurement structure. This measurement structure is positioned in a defined location relative to a reference element of the projection exposure system, ensuring that it is mechanically uncoupled from the mask holding device. Additionally, a detector is included to capture an image of the measurement structure as imaged by the projection optics. The system is configured to allow both imaging processes to occur concurrently, enhancing the efficiency and accuracy of the exposure process.
Career Highlights
Throughout his career, Paul Kaufmann has worked with prominent companies in the field, including Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His experience in these organizations has contributed to his expertise in microlithography and related technologies.
Collaborations
Kaufmann has collaborated with notable colleagues such as Ulrich Mueller and Joachim Stuehler. These partnerships have likely enriched his work and led to further advancements in the field.
Conclusion
Paul Kaufmann's contributions to microlithography through his innovative patents and collaborations highlight his importance as an inventor in the technology sector. His work continues to influence the development of advanced manufacturing processes.
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