Paul J Sullivan

Title: The Innovations of Paul J Sullivan

Introduction

Paul J Sullivan is a notable inventor based in Sunnyvale, CA, with a remarkable portfolio of 9 patents. His work primarily focuses on advanced metrology inspection tools, particularly in the semiconductor industry. Sullivan's innovative contributions have significantly impacted the efficiency and accuracy of inspection processes.

Latest Patents

One of Sullivan's latest patents is a method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool. This system is designed for inspecting specimens such as semiconductor wafers. It provides scanning of dual-sided specimens using a damping arrangement that filters unwanted acoustic and seismic vibrations. The optics arrangement scans a first portion of the specimen, while a translation or rotation arrangement allows for the specimen to be positioned for scanning the remaining portions. The system also includes means for stitching the scans together, which enhances the damping of the specimen and reduces the need for smaller and less expensive optical elements.

Career Highlights

Throughout his career, Paul J Sullivan has worked with prominent companies in the technology sector, including KLA-Tencor Technologies Corporation and KLA Tencor Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in metrology and inspection technologies.

Collaborations

Sullivan has collaborated with several talented individuals in his field, including George J Kren and Christopher F Bevis. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies.

Conclusion

Paul J Sullivan's contributions to the field of metrology inspection tools exemplify the spirit of innovation. His patents and collaborations reflect a commitment to enhancing the accuracy and efficiency of semiconductor inspections.