The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Jun. 18, 1999
Paul J. Sullivan, Sunnyvale, CA (US);
George Kren, Los Altos Hills, CA (US);
Rodney C. Smedt, Los Gatos, CA (US);
Hans J. Hansen, Pleasanton, CA (US);
David W. Shortt, Milpitas, CA (US);
Daniel Ivanov Kavaldjiev, Santa Clara, CA (US);
Christopher F. Bevis, Mountain View, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching the scans together, thereby providing both damping of the specimen and the need for smaller and less expensive optical elements.