The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 03, 2007
Filed:
Dec. 07, 2005
Christopher F. Bevis, Los Gatos, CA (US);
Paul J. Sullivan, Campbell, CA (US);
David W. Shortt, Milpitas, CA (US);
George J. Kren, Los Altos Hills, CA (US);
Christopher F. Bevis, Los Gatos, CA (US);
Paul J. Sullivan, Campbell, CA (US);
David W. Shortt, Milpitas, CA (US);
George J. Kren, Los Altos Hills, CA (US);
KLA-Tencor Technologies Corporation, Milpitas, CA (US);
Abstract
An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.