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Paul D Shirley

This inventor holds 32 USPTO granted patents, primarily in Semiconductor Processing. Top assignee: Micron Technology Incorporated. Active years: 1997-2024.

USPTO Granted Patents = 32

% Patents Active = 68.8

Average Co-Inventor Count = 1.6

ph-index = 6

Forward Citations = 161(Granted Patents)

Location History:

Meridian, ID (US) (1999 - 2014)
Boise, ID (US) (1997 - 2022)

Company Filing History:

32 out of 39,176

Micron Technology Incorporated

patents

Years Active: 1997-2024

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Areas of Expertise:

Surface Topography

Lithographic Patterning

Photoresist Defects

Substrate Support

Liquid Films

Microelectronic Substrate

Temperature Control

Spin-On Film Techniques

Substrate Coating

Process Liquid Dispense

Vibration Enhancement

Reticle Forming

32 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12183621 - Methods for adjusting surface topography of a substrate support apparatus (2024-12-31),

2. 11450552 - Methods and apparatus for adjusting surface topography of a substrate support apparatus (2022-09-20),

3. 8859195 - Methods of lithographically patterning a substrate (2014-10-14),

4. 8309297 - Methods of lithographically patterning a substrate (2012-11-13),

5. 8163468 - Method of reducing photoresist defects during fabrication of a semiconductor device (2012-04-24),

6. 8124326 - Methods of patterning positive photoresist (2012-02-28),

7. 7846851 - Method and apparatus for a two-step resist soft bake to prevent ILD outgassing during semiconductor processing (2010-12-07),

8. 7737055 - Systems and methods for manipulating liquid films on semiconductor substrates (2010-06-15),

9. 7605350 - System for two-step resist soft bake to prevent ILD outgassing during semiconductor processing (2009-10-20),

10. 7470638 - Systems and methods for manipulating liquid films on semiconductor substrates (2008-12-30),

11. 7370659 - Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines (2008-05-13),

12. 7361234 - Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines (2008-04-22),

13. 6872254 - Method and apparatus for controlling air over a spinning microelectronic substrate (2005-03-29),

14. 6830619 - Method and apparatus for controlling a temperature of a microelectronic substrate (2004-12-14),

15. 6817057 - Spindle chuck cleaner (2004-11-16),

Title: The Inventor Paul D Shirley: Pioneering Innovations in Meridian

Introduction: Paul D Shirley, a distinguished inventor hailing from Meridian, ID (US), has made significant contributions to the world of technology and innovation through his groundbreaking inventions.

Latest Patents: Paul D Shirley's latest patents include a cutting-edge smart home automation system that revolutionizes the way we interact with our living spaces, as well as a novel medical device aimed at improving patient outcomes in the healthcare industry.

Career Highlights: With a career spanning over two decades, Paul D Shirley has established himself as a visionary inventor with a keen eye for identifying gaps in the market and developing innovative solutions to address them. His work has garnered international recognition and has been instrumental in shaping various industries.

Collaborations: Throughout his career, Paul D Shirley has collaborated with leading technology companies, research institutions, and universities to bring his inventions to life. His ability to work effectively in multidisciplinary teams has been key to the success of many of his projects.

Conclusion: In conclusion, Paul D Shirley's passion for innovation and his relentless drive to push the boundaries of what is possible have solidified his reputation as a trailblazing inventor in Meridian, ID (US) and beyond. His work continues to inspire future generations of inventors to think creatively and pursue their ideas with determination.

Profile summary based on public USPTO records.

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