San Jose, CA, United States of America

Patrick M Maxton

USPTO Granted Patents = 5 

Average Co-Inventor Count = 3.1

ph-index = 5

Forward Citations = 155(Granted Patents)


Company Filing History:


Years Active: 2004-2007

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5 patents (USPTO):Explore Patents

Title: Exploring the Innovations of Inventor Patrick M Maxton

Introduction

Patrick M Maxton, a prominent inventor based in San Jose, California, has contributed significantly to the field of thin film analysis through his innovative designs. With a total of five patents to his name, Maxton's work stands at the forefront of technological advancement in material analysis.

Latest Patents

One of Patrick Maxton's latest inventions is a laser-based cleaning device designed for film analysis tools. This innovative system utilizes an energy beam, such as a laser, to meticulously remove a portion of a contaminant layer located on the surface of a thin film. The cleaning operation is precise, allowing only what is necessary to expose the underlying thin film for analysis. This method enhances throughput while mitigating the risks of recontamination and potential damage to the film itself. The design allows for the energy beam source to be integrated into traditional thin film analysis tools, significantly minimizing the overall footprint of the analysis system. Additionally, this invention optimizes throughput by focusing the probe beam for analysis at the same location as the cleaning energy beam, eliminating the need for repositioning after cleaning. Alternatively, the probe beam and energy beam can be directed to different locations, which helps in reducing contamination of the analysis optics.

Career Highlights

Throughout his career, Patrick Maxton has been associated with Kla-Tencor Technologies Corporation, where he has made substantial contributions to the field. His expertise in developing innovative solutions has established him as a valuable inventor in the industry.

Collaborations

Maxton has worked alongside esteemed colleagues, including Gary Janik and Haiming Wang. These collaborations have fostered an environment of innovation and shared knowledge, further enhancing the impact of their collective work in advancing thin film analysis technologies.

Conclusion

In summary, Patrick M Maxton's contributions to the field of thin film analysis through his patented inventions are noteworthy and impactful. His latest innovations, particularly the laser-based cleaning device, showcase his commitment to enhancing analysis efficiency while ensuring minimal risk to delicate materials. As he continues to push the boundaries of technology, Maxton's work will undoubtedly influence future developments in material analysis.

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