Company Filing History:
2 out of 1,190 
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1 out of 441 
Years Active: 2004-2009
Title: Noriaki Tateno: Innovator in Semiconductor Technology
Introduction
Noriaki Tateno is a prominent inventor based in Fukuoka, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of four patents. His innovative work focuses on electrostatic chuck modules and cooling systems, which are essential for efficient semiconductor production.
Latest Patents
Tateno's latest patents include an electrostatic chuck module and cooling system designed for semiconductor manufacturing apparatuses. This electrostatic chuck module can be cooled with water and is engineered to prevent penetration leaks. It features an electrostatic chuck plate made of alumina and a cooling plate bonded to the chuck, crafted from a Cu-based composite material. By adjusting the ratios of copper and nickel, along with tungsten and molybdenum, Tateno has developed a highly thermally conductive material that matches the thermal expansion coefficient of alumina. This innovation addresses the issue of penetration leaks, which are problematic in vacuum systems. Additionally, Tateno's electrostatic chuck for electrically insulative substrates utilizes a dielectric layer and a series of electrodes to create a non-uniform electric field, effectively attracting insulative substrates for processing.
Career Highlights
Throughout his career, Noriaki Tateno has worked with notable companies, including Toto Ltd. His expertise in semiconductor technology has positioned him as a key figure in the industry, contributing to advancements that enhance manufacturing processes.
Collaborations
Tateno has collaborated with esteemed colleagues such as Tetsuo Kitabayashi and Hiroaki Hori. Their combined efforts have furthered the development of innovative solutions in semiconductor technology.
Conclusion
Noriaki Tateno's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a leading inventor in the field. His work continues to influence the industry, paving the way for future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.