Heltersheim, Germany

Norbert Muenzel


Average Co-Inventor Count = 3.9

ph-index = 4

Forward Citations = 45(Granted Patents)


Location History:

  • Helterscheim, DE (1998)
  • Heltersheim, DE (1998 - 2000)

Company Filing History:


Years Active: 1998-2000

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7 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Norbert Muenzel in Photoresist Technology

Introduction

Norbert Muenzel, an esteemed inventor based in Heltersheim, Germany, has made significant strides in the field of polymer-based materials, particularly in the development of photoresist compositions. With a proud portfolio of seven patents, Muenzel's work is pivotal for advancements in microelectronics and photolithography, key technologies in semiconductor manufacturing.

Latest Patents

Muenzel's latest patents showcase his expertise in polymer chemistry and photoresist applications. One notable patent pertains to polymers for photoresist compositions, which possess an average molecular weight ranging from 5,000 to 1,000,000. These polymers feature structural repeating units that enhance the effectiveness of deep ultraviolet (DUV) photoresists, ensuring high processing stability and flow resistance. In another patent, he described wet-chemical, developable, and etch-stable photoresist compositions that are transparent for UV radiation at approximately 193 nm. This innovation incorporates nonaromatic chemical groups that can transition into latent aromatic groups under specific process conditions, thereby preserving the image structure during production. These resist coatings exhibit plasma etching stability comparable to traditional resists based on phenolic resins, showcasing Muenzel's contribution to advancing photoresist technology.

Career Highlights

Throughout his career, Norbert Muenzel has been associated with prominent companies in the chemical industry. He has worked at Olin Microelectronic Chemicals, Inc. and Arch Specialty Chemicals, Inc., where he applied his knowledge in polymer science to enhance product offerings and innovate new solutions for the microelectronics sector.

Collaborations

Muenzel has collaborated with notable professionals in his field, including Hans-Thomas Schacht and Carl-Lorenz Mertesdorf. These partnerships have enabled him to foster innovation through shared expertise and drive advancement in photoresist technology.

Conclusion

Norbert Muenzel's contributions to the field of photoresist compositions not only underscore his innovative mindset but also reflect the importance of collaboration within the research community. With his seven patents, Muenzel continues to impact the microelectronics landscape, paving the way for new technological advancements in the industry.

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