Location History:
- Tokyo, JP (1999)
- Chiba, JP (1996 - 2000)
Company Filing History:
10 out of 1,256 
1 out of 10,295 
Years Active: 1996-2000
Title: **Innovations of Nobuyuki Takeyasu: A Pioneer in Semiconductor Technology**
Introduction
Nobuyuki Takeyasu, an esteemed inventor based in Chiba, Japan, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 10 patents, his innovative approaches have enhanced the reliability and efficiency of semiconductor devices, making him a noteworthy figure in the industry.
Latest Patents
Among his latest inventions, Takeyasu has developed a **method for making metal interconnection** which involves forming an underlying metal film composed of high melting point metals, such as titanium and titanium nitride, on a semiconductor substrate. This method incorporates plasma etching in a chloride gas atmosphere, followed by the deposition of interconnecting metals such as aluminum, copper, gold, or silver. This meticulous process ensures a metal interconnection with improved reliability, particularly in miniaturized semiconductor devices.
Another notable patent is the **method of manufacturing a semiconductor device and an apparatus for it**. In this method, an insulating layer is first applied to a semiconductor substrate, followed by the formation of a contact hole. An underlying metal film is then uniformly deposited across the substrate, including within contact holes. By using hydrogen plasma treatment, the surface conditions of the underlying metal film are optimized, effectively removing contaminants for better aluminum deposition through a chemical vapor deposition process. This innovation showcases Takeyasu's commitment to enhancing semiconductor manufacturing processes.
Career Highlights
Throughout his career, Nobuyuki Takeyasu has been associated with prominent companies such as Kawasaki Steel Corporation and Tokyo Electron Limited. His work in these organizations has played a vital role in the development of advanced semiconductor technologies, contributing to the progression of the industry as a whole.
Collaborations
Takeyasu has collaborated with several talented individuals, including Tomohiro Ohta and Yumiko Kawano. These partnerships have fostered a creative environment conducive to innovation, leading to breakthroughs in the realm of semiconductor applications.
Conclusion
In conclusion, Nobuyuki Takeyasu has established himself as a key innovator in the semiconductor industry. His 10 patents reflect his dedication to enhancing semiconductor technology, ensuring reliability and efficiency in electronic devices. With a career marked by significant achievements and collaborative efforts, Takeyasu continues to inspire future generations of inventors and engineers in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.