Location History:
- Tokyo, JP (2003 - 2012)
- Imizu, JP (2010 - 2015)
Company Filing History:
Years Active: 2003-2015
Title: Nobuhito Shima: Innovator in Semiconductor Technology
Introduction
Nobuhito Shima is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 8 patents. His work focuses on improving substrate processing methods, which are crucial for the development of advanced semiconductor devices.
Latest Patents
One of his latest patents is a semiconductor device producing method. This invention involves a substrate processing device that includes a reaction vessel designed to receive a substrate and supply multiple reaction gases for processing. The device features an exhaust port for removing gases and a gas supply system that includes a cleaning gas supply unit. This unit is essential for removing adherents from the reaction vessel, while a post-processing gas supply unit ensures that any remaining elements from the cleaning gas are eliminated. Another notable patent is a substrate processing apparatus that consists of a processing chamber, a gas supply unit, and a gas exhaust unit. This apparatus utilizes first and second electrodes that apply high-frequency power to activate the processing gas, enhancing the efficiency of substrate processing.
Career Highlights
Nobuhito Shima is currently employed at Hitachi Kokusai Electric Inc., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of substrate processing, which is vital for the production of high-performance semiconductor devices.
Collaborations
Throughout his career, Shima has collaborated with notable colleagues, including Masanori Sakai and Kazuyuki Toyoda. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Nobuhito Shima's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the advancement of semiconductor devices, making a lasting impact on the industry.