Company Filing History:
Years Active: 1985-1989
Title: Ninko T Mirkovich: Innovator in Modular Article Processing Technology
Introduction
Ninko T Mirkovich is a notable inventor based in Novato, California, recognized for his contributions to the field of automated article processing, particularly in semiconductor wafer processing. With a total of six patents to his name, Mirkovich has made significant advancements that enhance the efficiency and reliability of wafer handling systems.
Latest Patents
Mirkovich's latest patents include the "Cassette elevator for use in a modular article processing machine" and "Modular article processing machine and method of article handling therein." The cassette elevator patent focuses on improving the handling of multi-wafer cassettes in automated wafer processing machines. This innovative design allows for easy configuration of the receiver/sender portion of the machine to accommodate single or multiple cassette elevators, all while maintaining a compact width. Additionally, the automatic tilt feature of the cassette elevator minimizes the risk of wafer breakage during loading and unloading operations. The modular article processing machine patent describes a system that allows for seamless reconfiguration between single and multiple processing stations, ensuring efficient throughput and adaptability in various operational scenarios.
Career Highlights
Mirkovich is currently employed at Tegal Corporation, where he continues to develop cutting-edge technologies in the semiconductor industry. His work has been instrumental in advancing the capabilities of automated processing machines, making them more versatile and user-friendly.
Collaborations
Throughout his career, Mirkovich has collaborated with esteemed colleagues such as John P Zajac and Thomas M Rathmann. These partnerships have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Ninko T Mirkovich stands out as a key figure in the realm of modular article processing technology. His patents reflect a commitment to improving the efficiency and safety of semiconductor wafer handling systems. His contributions continue to shape the future of automated processing in the industry.