The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 01, 1988
Filed:
Mar. 02, 1987
Applicant:
Inventors:
Ninko T Mirkovich, Novato, CA (US);
John Zajac, San Jose, CA (US);
Assignee:
Tegal Corporation, Novato, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A47G / ;
U.S. Cl.
CPC ...
211 41 ; 211 594 ; 211189 ;
Abstract
A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. A passthrough cassette comprising inwardly extending arms having a stepped portion thereon for holding a wafer enables access from orthogonal directions. An improved vacuum feedthrough actuates the cassette.