The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 1986
Filed:
Mar. 09, 1984
Applicant:
Inventors:
Ninko T Mirkovich, Novato, CA (US);
John Zajac, San Jose, CA (US);
Assignee:
Tegal Corporation, Novato, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
414217 ; 118500 ; 118728 ; 118733 ; 414222 ;
Abstract
A multi-wafer load lock apparatus for use in wafer processing machines provides access to wafers in an internal cassette by orthogonal wafer transport devices. Upper and lower bell jars, which seal to a sealing plate, provide access to the cassette by outside and vacuum transport mechanisms, respectively. A right angle passthrough cassette allows orthogonal access. An improved vacuum feedthrough actuates both the upper bell jar and the internal cassette.