Location History:
- Fremont, CA (US) (2017 - 2019)
- Union City, CA (US) (2019 - 2024)
Company Filing History:
Years Active: 2017-2025
Title: Nikhil Dole: Innovator in Plasma Processing Technology
Introduction
Nikhil Dole is a prominent inventor based in Union City, California. He has made significant contributions to the field of plasma processing technology, holding a total of 12 patents. His innovative work focuses on enhancing etch processes in semiconductor manufacturing.
Latest Patents
Among his latest patents, Dole has developed a method for performing an etch process on a substrate in a plasma processing system. This method involves applying source RF power and bias RF power to an electrode, utilizing multi-state RF pulsing to control mask shape and manage the trade-off between selectivity and process margin. Another notable patent involves multiple state pulsing for high aspect ratio etch, which defines a repeated pulsed RF cycle with varying power levels for bias and source signals.
Career Highlights
Dole is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has positioned him as a key player in advancing plasma processing techniques, contributing to the efficiency and effectiveness of semiconductor manufacturing.
Collaborations
Some of his notable coworkers include Eric A Hudson and Takumi Yanagawa, who collaborate with him on various projects within the company.
Conclusion
Nikhil Dole's innovative contributions to plasma processing technology have significantly impacted the semiconductor industry. His patents reflect a deep understanding of etch processes, showcasing his expertise and commitment to advancing technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.