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Utsunomiya, Japan

Naoto Sano

USPTO Granted Patents = 18

Average Co-Inventor Count = 1.7

ph-index = 8

Forward Citations = 209(Granted Patents)

Location History:

Kunitachi, JP (1992 - 1997)
Utsunomiya, JP (1996 - 2006)
Tochigi, JP (2005 - 2006)

Company Filing History:

17 out of 90,756

Canon Kabushiki Kaisha

2 out of 832,891

Other

patents

where one patent can have more than one assignee

Years Active: 1992-2006

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18 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7145925 - Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method (2006-12-05),

2. 7031364 - Gas laser device and exposure apparatus using the same (2006-04-18),

3. 6870865 - Laser oscillation apparatus, exposure apparatus, semiconductor device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method (2005-03-22),

4. 6795167 - Projection exposure apparatus and device manufacturing method using the same (2004-09-21),

5. 6727976 - Exposure apparatus with a pulsed laser (2004-04-27),

6. 6646717 - Projection exposure apparatus and device manufacturing method using the same (2003-11-11),

7. 6348357 - Exposure apparatus with a pulsed laser (2002-02-19),

8. 6322220 - Exposure apparatus and device manufacturing method using the same (2001-11-27),

9. 6215806 - Excimer laser generator provided with a laser chamber with a fluoride passivated inner surface (2001-04-10),

10. 5969799 - Exposure apparatus with a pulsed laser (1999-10-19),

11. 5949468 - Light quantity measuring system and exposure apparatus using the same (1999-09-07),

12. 5923693 - Discharge electrode, shape-restoration thereof, excimer laser (1999-07-13),

13. 5846678 - Exposure apparatus and device manufacturing method (1998-12-08),

14. 5661547 - Exposure method and apparatus and device produced thereby in which a (1997-08-26),

15. 5597670 - Exposure method and apparatus (1997-01-28),

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