The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 1999
Filed:
Jul. 10, 1996
Tsutomu Asahina, Kodaira, JP;
Naoto Sano, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A light quantity measuring system and an exposure apparatus using the same, wherein the measuring system includes a light intensity measuring device having a plurality of light receiving elements arrayed at least along a scan direction, a scanning mechanism for scanningly moving the light intensity measuring device relative to a particular region to be examined, and a storing device for storing an intensity of light of each light receiving element, as successively received by the light receiving elements as the light intensity measuring device is scanningly moved relative to the particular region. The light quantity is measured on the basis of information stored in the storing device.