Location History:
- Hyogo-ken, JP (2006)
- Takasago, JP (2007 - 2011)
Company Filing History:
4 out of 355 
2 out of 4,618 
1 out of 1 Years Active: 2006-2011
Title: Naoki Yahata: Innovator in Metal Film Production
Introduction
Naoki Yahata is a prominent inventor based in Takasago, Japan. He has made significant contributions to the field of metal film production, holding a total of 7 patents. His innovative approaches have led to advancements in the efficiency and quality of metal film applications.
Latest Patents
Yahata's latest patents include a barrier metal film production apparatus and method, as well as a metal film production method and apparatus. In his barrier metal film production method, a chlorine gas plasma is generated within a chamber between a substrate and a metal member. The metal member is etched with the chlorine gas plasma to form a precursor. Excited nitrogen gas is introduced separately, leading to the formation of a metal nitride film on the substrate. This process allows for the production of a barrier metal film with excellent burial properties and minimal thickness, while suppressing metal diffusion and enhancing adhesion. His metal film production apparatus utilizes a copper plate member, which is also etched with chlorine gas plasma to create a precursor. The controlled temperatures of the copper plate and substrate facilitate the deposition of the copper component, resulting in a high-speed film formation with reduced impurities.
Career Highlights
Throughout his career, Naoki Yahata has worked with notable companies such as Canon Anelva Corporation and Mitsubishi Heavy Industries Limited. His experience in these organizations has contributed to his expertise in metal film technologies and production methods.
Collaborations
Yahata has collaborated with esteemed colleagues, including Hitoshi Sakamoto and Yoshiyuki Ooba. These partnerships have further enriched his work and innovations in the field.
Conclusion
Naoki Yahata's contributions to metal film production demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of the complexities involved in film formation, positioning him as a key figure in this technological domain.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.