Tokyo, Japan

Naohiro Yamamoto


Average Co-Inventor Count = 3.9

ph-index = 3

Forward Citations = 17(Granted Patents)


Location History:

  • Kudamatsu, JP (2014 - 2016)
  • Tokyo, JP (1991 - 2018)

Company Filing History:


Years Active: 1991-2018

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13 patents (USPTO):Explore Patents

Title: Naohiro Yamamoto: Innovator in Plasma Processing Technologies

Introduction

Naohiro Yamamoto is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of plasma processing, holding a total of 13 patents. His innovative work has advanced the technology used in various applications, particularly in the semiconductor industry.

Latest Patents

Yamamoto's latest patents include a plasma processing method and a plasma etching method. The plasma processing method involves forming a pattern of a mask on a laminated film of a magnetic film and a metal oxide film. This method includes plasma etching the magnetic film in a chamber and performing plasma cleaning using a gas mixture of chlorine element-containing gas and boron trichloride gas. The plasma etching method focuses on etching a sample that consists of multiple layers, including magnetic films and metal oxide films. It utilizes carbon monoxide gas for the first etching process and a mixed gas of hydrogen and inactive gas for the second process.

Career Highlights

Throughout his career, Naohiro Yamamoto has worked with notable companies such as Hitachi High-Technologies Corporation and Konami Digital Entertainment Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in plasma processing.

Collaborations

Yamamoto has collaborated with talented individuals in his field, including Makoto Suyama and Daisuke Fujita. These collaborations have fostered innovation and have led to the development of advanced technologies.

Conclusion

Naohiro Yamamoto's contributions to plasma processing technologies have established him as a key figure in the field. His innovative patents and collaborations reflect his commitment to advancing technology and improving processes in the semiconductor industry.

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