Nagarajan Rajagopalan

Title: Innovations by Nagarajan Rajagopalan: A Look at His Contributions to Semiconductor Technology

Introduction: Nagarajan Rajagopalan, a prominent inventor based in Santa Clara, California, has made significant contributions to the field of semiconductor technology. With a remarkable portfolio of 26 patents, his work exemplifies innovation and advancement in the industry.

Latest Patents: Among his latest innovations, Rajagopalan has developed groundbreaking methodologies in semiconductor structure formation. One notable patent focuses on "Modified stacks for 3D NAND," which includes exemplary methods of forming semiconductor structures. These methods involve creating a silicon oxide layer from silicon-containing and oxygen-containing precursors. Additionally, a silicon nitride layer is formed, characterized by an oxygen concentration greater than or around 5 atomic percent. This process entails repeating the formation of silicon oxide and silicon nitride layers to produce an alternating stack of these materials.

Another important patent concerns the "PECVD process," which outlines a method for processing substrates using Plasma-Enhanced Chemical Vapor Deposition (PECVD). It highlights the adjustment of the substrate's temperature and plasma density profiles to optimize the deposition rate across the substrate. Furthermore, the patent discusses the heating of chamber surfaces to enhance plasma density uniformity and decrease the formation of subpar deposits on those surfaces. In situ metrology is incorporated to monitor the deposition process, allowing for real-time adjustments to temperature profiles, plasma density, pressure, and the flow of reactants.

Career Highlights: Nagarajan Rajagopalan is currently associated with Applied Materials, Inc., a leading innovator in materials engineering solutions for the semiconductor industry. His expertise in semiconductor processing techniques has greatly contributed to the technological advancements within the company and the industry at large.

Collaborations: Throughout his career, Rajagopalan has collaborated with notable professionals, including Bok Hoen Kim and Xinhai Han. These partnerships have fostered an environment of innovation and have led to the successful development of cutting-edge semiconductor technologies.

Conclusion: Nagarajan Rajagopalan's work as an inventor is a testament to his innovative spirit in the semiconductor field. With a portfolio of 26 patents and significant contributions at Applied Materials, Inc., his advancements play a pivotal role in shaping the future of semiconductor technology. His collaborations further enhance the impact of his work, underscoring the importance of teamwork in driving innovation.