Myungsun Choi

Title: Myungsun Choi: Innovator in Semiconductor Technology

Introduction

Myungsun Choi is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of eight patents. His work focuses on advanced etching methods that are crucial for semiconductor device fabrication.

Latest Patents

Among his latest patents is an operation method of an etching apparatus and a method of manufacturing semiconductor devices using the same. This innovative operation method involves transferring a substrate from a load lock chamber to a process chamber, where the etching target layer is first etched in a specified time. The substrate is then stored in a vacuum state, followed by intermediate cleaning of the process chamber. Afterward, the substrate undergoes a second etching process to form a predetermined etching pattern. Another notable patent is a plasma etching method that includes generating plasma on a substrate and utilizing various bias powers to concentrate and accelerate the plasma toward the substrate.

Career Highlights

Myungsun Choi is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His expertise in etching methods has positioned him as a key player in the development of advanced semiconductor devices.

Collaborations

He has collaborated with notable coworkers, including Seungbo Shim and Dougyong Sung, contributing to various projects that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Conclusion

Myungsun Choi's innovative work in semiconductor technology, particularly in etching methods, has made a significant impact on the industry. His contributions continue to shape the future of semiconductor device fabrication.