Motoko Nakagomi

Title: Motoko Nakagomi: Innovator in Plasma Processing Technology

Introduction

Motoko Nakagomi is a prominent inventor based in Nirasaki, Japan. She has made significant contributions to the field of plasma-based processing technology, holding a total of 4 patents. Her innovative work has advanced the capabilities of substrate processing in various applications.

Latest Patents

One of her latest patents is a substrate mounting table designed for use in a plasma-based processing apparatus. This table features a substrate mounting portion with a front surface that has undergone a mirroring treatment, allowing for precise substrate placement. Additionally, the edge portion surrounding the mounting area is treated to have an uneven shape, enhancing its functionality.

Another notable patent is a method of etching a film of a workpiece. This method involves measuring the flow rate of a first gas and calibrating a flow rate controller based on the internal pressure of a chamber. The process includes supplying a second gas, exhausting the chamber, and forming a reaction product from the film, which is then removed by heating the workpiece in a separate chamber.

Career Highlights

Motoko Nakagomi is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. Her work at the company has positioned her as a key player in the development of advanced processing technologies.

Collaborations

Throughout her career, Nakagomi has collaborated with notable colleagues, including Kohichi Satoh and Kensaku Narushima. These partnerships have fostered innovation and contributed to the success of her projects.

Conclusion

Motoko Nakagomi's contributions to plasma processing technology exemplify her dedication to innovation and excellence. Her patents reflect her expertise and commitment to advancing the field, making her a significant figure in the industry.