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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10968514 B1

PDFFull Text
Date of Patent:
Apr. 06, 2021

Filed:

Nov. 16, 2018

Substrate mounting table

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Kohichi Satoh, Nirasaki, JP;

Hideaki Yamasaki, Nirasaki, JP;

Motoko Nakagomi, Nirasaki, JP;

Junya Oka, Nirasaki, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Lee D Wilson

Int. Cl.
CPC ...
H01L 21/687 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); C23C 16/505 (2006.01); C23C 16/08 (2006.01); H01L 21/285 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4581 (2013.01); H01J 37/32715 (2013.01); H01L 21/68735 (2013.01); H01L 21/68757 (2013.01); C23C 16/08 (2013.01); C23C 16/505 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3328 (2013.01); H01L 21/28568 (2013.01);
Abstract

There is provided a substrate mounting table for use in a plasma-based processing apparatus that performs a plasma-based process on a substrate inside a processing container, which includes a substrate mounting portion having a front surface subjected to a mirroring treatment and on which the substrate is mounted, and an edge portion located around the substrate mounting portion and treated to have an uneven shape.

Find Patent Forward Citations

Satoh, Kohichi. (2021). Substrate mounting table (U.S. Patent No. 10968514). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10968514

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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