Company Filing History:
2 out of 42,485 
2 out of 21 
2 out of 10,295 
Years Active: 1995-1997
Title: Motohiro Hirano: A Pioneer in Plasma Etching Technology
Introduction
Motohiro Hirano, an innovative inventor based in Hachioji, Japan, has made significant contributions to the field of plasma etching technology. With a total of two patents to his name, Hirano has demonstrated his expertise and commitment to advancing industrial processes that involve plasma applications.
Latest Patents
Hirano's latest inventions focus on plasma etching systems and methods. His patented plasma etching system includes a process chamber that encloses a plasma environment, essential for various etching operations. Notably, the design incorporates a chuck electrode for substrate support and a shower electrode that features a multitude of small holes. These small holes facilitate the supply of a plasma-forming gas at a mass flow rate of at least 620 kg/m²/hr, enabling efficient etching processes. This inventive approach enhances the performance and effectiveness of plasma etching technologies.
Career Highlights
Throughout his career, Motohiro Hirano has worked with well-known organizations such as Hitachi, Ltd. and Hitachi Tokyo Electronics Co., Ltd. These experiences have played a crucial role in honing his skills and advancing his understanding of innovative technologies in the electronics and semiconductor industries.
Collaborations
Hirano has collaborated with notable colleagues, including Kazushi Tomita and Yoshikazu Ito. Working alongside these talented individuals, he has furthered the development of innovative solutions in the field of plasma etching, leading to advancements that benefit numerous applications across various industries.
Conclusion
Motohiro Hirano continues to be a driving force in the development of plasma etching systems and methods. His patents reflect his dedication to innovation and improvement in technology, underscoring the importance of collaboration and expertise in achieving remarkable advancements in the field. As the industry evolves, Hirano's contributions remain significant, paving the way for future innovations in plasma technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.