Mohammad Awad

Title: Innovations of Mohammad Awad in Microlithography

Introduction

Mohammad Awad is a notable inventor based in Heidenheim, Germany. He has made significant contributions to the field of microlithography, holding a total of 4 patents. His work focuses on advanced optical systems and drive devices that enhance the precision and efficiency of lithography processes.

Latest Patents

One of his latest patents is titled "Mirror, in particular for microlithography." This invention includes a substrate, a reflection layer system, and at least one continuous piezoelectric layer arranged between the substrate and the layer system. An electric field producing a locally variable deformation is applied to the piezoelectric layer via a first, layer-system-side electrode arrangement and a second, substrate-side electrode arrangement. The design features a mediator layer that sets a regionally continuous profile of the electrical potential along the respective electrode arrangement. Each electrode in the arrangement is configured to receive an electrical voltage relative to the other electrode arrangement, ensuring precise control over the mirror's performance.

Another significant patent is for a "Drive device, optical system and lithography apparatus." This invention includes a drive unit that applies a drive voltage to a capacitive actuator to set its position. It features a source controllable by an excitation signal, which feeds a time-dependent AC current signal into the first node, resulting in an AC voltage at the capacitive actuator. The device also includes a filter unit to process the output signal of the capacitive actuator and a determining unit that assesses the impedance behavior of the actuator based on the filtered output signal.

Career Highlights

Mohammad Awad is currently employed at Carl Zeiss SMT GmbH, a leading company in the field of optical systems and lithography technology. His work at this esteemed organization has allowed him to develop innovative solutions that push the boundaries of current technology.

Collaborations

Throughout his career, Mohammad has collaborated with talented individuals such as Jan Horn and Kerstin Hild. These partnerships have fostered a creative environment that has led to the development of groundbreaking technologies in microlithography.

Conclusion

In summary, Mohammad Awad is a distinguished inventor whose contributions to microlithography have resulted in several innovative patents. His work continues to influence the field, showcasing the importance of collaboration and creativity in technological advancements.